Method of manufacturing liquid crystal display device

ABSTRACT

In a method of manufacturing an LCD device, TFT unit cells are formed on a first mother substrate, and color filter unit cells are formed on a second mother substrate. A liquid crystal alignment film is formed on the TFT unit cells and on the color filter unit cells. The first mother substrate and the second mother substrate are assembled to form an assembled substrate and liquid crystal is disposed between the TFT unit cell and the color filter unit cell. An LCD unit cell is inspected by applying a test driving signal via non-contact method. The LCD unit cell is separated from the assembled substrate to form an LCD panel. A driving module and the LCD panel are assembled to be formed an LCD assembly.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application relies for priority upon Korean Patent ApplicationNo.2002-72796 filed on Nov. 21, 2002, the contents of which are hereinincorporated by reference in its entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method of manufacturing a liquidcrystal display device, and more particularly to a method ofmanufacturing a liquid crystal display device having a reduced time formanufacturing the liquid crystal display device and an enhancedproductivity.

2. Description of the Related Art

In general, a liquid crystal display device is lighter and smaller incomparison with other display devices. The liquid crystal displaydevices are manufactured via many manufacturing processes.

A first process for manufacturing the liquid crystal display deviceincludes forming thin film transistor (tft) unit cells on a first mothersubstrate and forming color filter unit cells on a second mothersubstrate. One example of the first process for manufacturing the liquidcrystal display device is disclosed in U.S. Pat. No. 6,391,137 (entitled‘method for manufacturing display device’).

A second process for manufacturing the liquid crystal display deviceincludes a rubbing process. Liquid crystal layer disposed between thethin film transistor unit cell and the color filter unit cell is alignedvia the rubbing process on the thin film transistor unit cells and thecolor filter unit cells. One example of the second process is disclosedin U.S. Pat. No. 5,879,497 (entitled ‘Alignment Device and Rubbing Clothfor Alignment with respect to Liquid Crystal Display Device-useSubstrate, and Method for Manufacturing a Liquid Crystal DisplayDevice’). A cylindrical roller covered by a piled fabric (or rubbingcloth) having pile rolls on the alignment film, so that an alignmentgroove is formed on the alignment film. The alignment groove createspre-tilt angles of liquid crystal molecules of the liquid crystal layer.

One example of a third process for manufacturing the liquid crystaldisplay device is disclosed in the U.S. Pat. No. 6,397,137. The thirdprocess includes an assembly process for assembling the first mothersubstrate and the second mother substrate. The first mother substrateand second mother substrate are assembled such that the thin filmtransistor unit cells of the first mother substrate face the colorfilter unit cells of the second mother substrate unit cell. Hereinafter,the first mother substrate and second mother substrate are referred toas an ‘assembled substrate’, and the thin film transistor unit cell andcolor filter unit cell are referred to as a ‘liquid crystal displaydevice unit cell’.

One example of a fourth process for manufacturing the liquid crystaldisplay device is disclosed in the U.S. Pat. No. 6,397,137. The fourthprocess includes a scribe-and-break process for scribing and separatingthe liquid crystal display device unit cells from the assembledsubstrate. One liquid crystal display device unit cell separated fromthe assembled substrate is referred to as a ‘liquid crystal displaypanel’.

A fifth process for manufacturing the liquid crystal display deviceincludes a test process. A test driving signal is applied to the liquidcrystal display panel for testing the liquid crystal display panel.

A sixth process for manufacturing the liquid crystal display deviceincludes a liquid crystal injection process for injecting liquid crystalinto a cell gap disposed between the first mother substrate and thesecond mother substrate, and cell gap modulating process for modulatingthe size of the cell gap.

A seventh process for manufacturing the liquid crystal display deviceincludes a polarizing plate attaching process and module process. Apolarizing plate (or polarizing plates) is (are) attached on the liquidcrystal display panel via the polarizing plate attaching process. Adriving module for driving the liquid crystal display panel is installedon the liquid crystal display panel via the module process. Hereinafter,the liquid crystal display device having the driving module is referredto as a ‘liquid crystal display panel assembly’.

Generally, the sequence of the conventional manufacturing processes hasbeen maintained, and the failures occurring during each of the processeshas been reduced.

However, the conventional manufacturing processes has some criticalproblems.

For example, a process speed of each of processes is different from eachother. In detail, a process speed of the first through the thirdprocesses is different from that of the fourth through the seventhprocesses. In general, the process speed of the first through the thirdprocesses is faster than that of the fourth through the seventhprocesses. Namely, the process speed of the processes of manufacturingthe thin film transistor unit cell, the color filter unit cell and theassembled substrate is faster than the process speed of the scribeprocess, separation process, the test process, the liquid crystalinjection process, polarizing plate attaching process and the moduleprocess.

Therefore, the assembled substrate that has passed through the thirdprocess should stand by for a predetermined time so as to undergo thefourth process. The longer the assembled substrate stands by, the loweris the productivity of the liquid crystal display device.

More equipment may be established in the fourth through the seventhprocesses in order to solve above problem. In other word, extensions ofequipment may increase the productivity of the liquid crystal displaydevices. However, the more equipment greatly increases manufacturingcost.

Further, the conventional manufacturing processes have many problems.

A first problem occurs in the rubbing process. The rubbing process foraligning the liquid crystal molecules has the following problem. Theroller covered by a piled fabric having pile rolls on the alignmentfilm, so that an alignment groove is formed on the alignment film. Thealignment groove creates pre-tilt angles of liquid crystal molecules ofthe liquid crystal layer.

However, many particles are generated as a byproduct in the conventionalrubbing process. The particles may induce failures during the rubbingprocess. In order to eliminate the particles, a cleaning process isneeded. The cleaning process includes a chemical cleaning process inwhich chemical cleaning agent resolves the particles and the particlesare removed, a process for removing the chemical cleaning agent by purewater, and a dry process for removing the pure water. Accordingly, thetime for manufacturing the liquid crystal display device may beincreased due to the cleaning process.

Further, according to the conventional rubbing process, the rubbingcloth is replaced by a new rubbing cloth or the rubbing cloth is cleanedperiodically. Therefore, the conventional rubbing process cannot besuccessively performed and the efficiency of manufacturing the liquidcrystal display device is lowered.

Moreover, in the conventional rubbing process, the piled fabric (rubbingcloth) having pile forms alignment grooves on the alignment film.Therefore, defects of the alignment grooves are seldom detected, whenthe alignment grooves are already formed. The defects of the alignmentgrooves may be detected in the reliability test of the liquid crystaldisplay device after the liquid crystal display device is completelymanufactured. The liquid crystal display device having a defect of thealignment groove lowers image display quality.

A second problem occurs after the assembled substrate is manufactured.When the assembled substrate is manufactured, the liquid crystal displaydevice unit cells are separated from the assembled substrate, and eachof the liquid crystal display panels are manufactured using each of theliquid crystal display device unit cells. Input terminals and (or)output terminals are exposed to the air, and the input/output terminalsare oxidized, so that a thin oxidation film may be formed on the surfaceof the input/output terminals. The thin oxidation film deteriorateselectrical characteristics of the input/output terminals. Therefore,display quality of the liquid crystal display device is lowered.

A fourth problem occurs in the module process. Liquid crystal isinjected into liquid crystal display panel and a polarizing plate isattached onto the liquid crystal display panel. The polarizing plate isattached onto each of the liquid crystal display panels separated fromthe assembled substrate one by one. Therefore, much time is required soas to attach the polarizing plate onto the assembled substrate.

In order to overcome above problem, the polarizing plate may be attachedonto the assembled substrate. Then, the polarizing plate attached ontothe assembled substrate is cut off, so that a liquid crystal displaydevice unit cell having a polarizing plate on is manufactured. However,it is hard to detect the defect of the liquid crystal display deviceunit cell before cutting off the assembled substrate. When a polarizingplate is attached onto a defective liquid crystal display unit cell, thepolarizing plate is wasted.

SUMMARY OF THE INVENTION

Accordingly, there is provided a method of manufacturing a liquidcrystal display device, which provides an enhanced productivity formanufacturing the liquid crystal display device and a reduce time formanufacturing the liquid crystal display device.

According to one aspect of the method of this invention, a thin filmtransistor unit cell is formed on a thin film transistor unit cellregion of a first mother substrate, and a color filter unit cell isformed on a color filter unit cell region of a second mother substrate.A liquid crystal alignment film is formed on the thin film transistorunit cell and on the color filter unit cell. The first mother substrateand the second mother substrate are assembled to form an assembledsubstrate, such that the thin film transistor unit cell faces the colorfilter unit cell, and liquid crystal is disposed between the thin filmtransistor unit cell and the color filter unit cell. A liquid crystaldisplay unit cell including the thin film transistor unit cell and thecolor filter unit cell facing the thin film transistor unit cell isinspected by applying a test driving signal via non-contact method. Theliquid crystal display unit cell is separated from the assembledsubstrate to form a liquid crystal display panel. A driving module andthe liquid crystal display panel are assembled to be formed a liquidcrystal display panel assembly.

According to the present invention, a polarizing plate is attached ontoan assembled substrate on which at least one liquid crystal display unitcells are formed, the at least one liquid crystal display unit cell areseparated from the assembled substrate, a liquid crystal display panelis manufactured, and a driving module is installed on the liquid crystaldisplay panel, so that the time for manufacturing the liquid crystaldisplay device are reduced and the productivity of manufacturing theliquid crystal display device is enhanced.

According to the present invention, the alignment film is formed on thethin film transistor unit cell and on the color filter unit cell by anon-contact method. Therefore, time for forming the alignment film isreduced and alignment of the liquid crystal molecules is improved.

According to the present invention, the assembled substrate is inspectedwhether the assembled substrate has defect or not before the polarizingplate is attached to the assembled substrate. In case the assembledsubstrate has defect, the polarizing plate is not attached to theassembled substrate.

According to the present invention, the liquid crystal display unitcells are separated from the assembled substrate after the polarizingplate is attached on the assembled substrate. Therefore, time forattaching the polarizing plate to the liquid crystal display unit cellsis reduced and the productivity for manufacturing the liquid crystaldisplay device is enhanced.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of the present inventionwill become more apparent by describing in detail the embodimentsthereof with respect to the accompanying drawings, in which:

FIG. 1 is a flow chart showing a method of manufacturing a liquidcrystal display device according to a first exemplary embodiment;

FIG. 2 is a schematic view showing a first mother substrate and thinfilm transistor unit cell regions formed on the first mother substrateaccording to the first exemplary embodiment;

FIG. 3 is a schematic view showing a pixel electrode and a thin filmtransistor of a thin film transistor unit cell formed in the thin filmtransistor unit cell region of FIG. 2;

FIG. 4 is a cross-sectional view showing a pixel electrode and a thinfilm transistor of FIG. 3;

FIG. 5 is a schematic view showing a second mother substrate and colorfilter unit cell regions formed on the second mother substrate accordingto the first exemplary embodiment;

FIG. 6 is a cross-sectional view showing a portion of a color filterunit cell of FIG. 5;

FIG. 7 is a cross-sectional view showing an alignment film formed on thefirst mother substrate or the second mother substrate according to thefirst exemplary embodiment;

FIG. 8 is a flow chart showing a method of aligning liquid crystal on analignment film by a non-contact method according to the first exemplaryembodiment of the present invention;

FIG. 9 is a flow chart showing a method of generating a first ion beamof FIG. 8;

FIG. 10 is a schematic diagram showing a non-contact alignment deviceaccording to the first exemplary embodiment;

FIG. 11 is a schematic view showing a first ion beam generating module,a second ion beam generating module and an atomic beam generating moduleof FIG. 10;

FIG. 12 is a schematic view showing a non-contact alignment device and adevice for forming a diamond-like-carbon thin film;

FIG. 13 is a flow chart showing a method of aligning liquid crystal by anon-contact method according to a second exemplary embodiment;

FIG. 14 is a flow chart showing a method of forming a polarizedfunctional group in the diamond-like-carbon thin film according to thesecond exemplary embodiment;

FIG. 15 is a flow chart showing a process of introducing a hydroxylradical (OH⁻) into the polarized functional group;

FIG. 16 is a flow chart showing a process of introducing a hydrogen ioninto the polarized functional group according to a third exemplaryembodiment of the present invention;

FIG. 17 is a flow chart showing a process of introducing a nitrogen ioninto the polarized functional group according to a fourth exemplaryembodiment of the present invention;

FIG. 18 is a schematic view showing a non-contact alignment deviceaccording to a fifth exemplary embodiment of the present invention;

FIG. 19 is a schematic view showing a non-contact alignment deviceaccording to a sixth exemplary embodiment of the present invention;

FIG. 20 is a schematic view showing a non-contact alignment deviceaccording to seventh exemplary embodiment of the present invention;

FIG. 21 is a schematic view showing a non-contact alignment deviceaccording to a eighth exemplary embodiment of the present invention;

FIG. 22 is a flow chart showing a method for generating an atomic beamaccording to a ninth exemplary embodiment of the present invention;

FIG. 23 is a schematic view showing an atomic beam generating deviceaccording to a tenth exemplary embodiment of the present invention;

FIG. 24 is a flow chart showing a non-contact aligning method ofaligning liquid crystal molecule on an alignment film according toeleventh embodiment of the present invention;

FIG. 25 is a schematic view showing a non-contact alignment deviceaccording to a twelfth exemplary embodiment of the present invention;

FIG. 26 is a cross-sectional view showing a transparent thin film formedon a mother substrate;

FIG. 27 is a cross-sectional view showing a carbon polymer formed on thetransparent thin film of FIG. 26;

FIG. 28 is a flow chart showing a method for detecting unfilled regionin which the liquid crystal is not filled;

FIG. 29 is a schematic view showing an example of detecting device fordetecting the unfilled region;

FIG. 30A is a flow chart showing a non-contact inspecting method ofinspecting the liquid crystal display unit cell;

FIG. 30B is a flow chart showing a method of driving the liquid crystaldisplay unit cell of FIG. 30A;

FIG. 30C is a flow chart showing a method of inspecting the liquidcrystal display unit cell of FIG. 30A;

FIG. 31 is a schematic view showing an example of a non-contactinspecting device;

FIG. 32 is a schematic view showing an example of an attaching devicefor attaching a polarizing plate to the liquid crystal display unitcell;

FIG. 33 is a cross-sectional view showing a first mother polarizingplate;

FIG. 34 is a cross-sectional view showing a second mother polarizingplate;

FIG. 35 is a schematic view showing an example of a first cutting-outmodule of FIG. 32

FIG. 36 is a schematic view showing a first (or second) motherpolarizing plate cut out by a first x-axis blade of FIG. 35;

FIG. 37 is a schematic view showing a first (or second) motherpolarizing plate cut out by a first y-axis blade after cut out by thefirst x-axis blade of FIG. 35;

FIG. 38 is a schematic view showing a first protection-sheet stripmodule of FIG. 32; and

FIG. 39 is a schematic view showing a polarizing plate attaching moduleof FIG. 32.

DESCRIPTION OF PREFERRED EMBODIMENTS

Hereinafter the preferred embodiment of the present invention will bedescribed in detail with reference to the accompanying drawings.

FIG. 1 is a flow chart showing a method of manufacturing a liquidcrystal display device according to a first exemplary embodiment.

Referring to FIG. 1, at least one thin film transistor unit cell isformed on a first mother substrate, and at least one color filter unitcell is formed on a second mother substrate (step S100). The thin filmtransistor unit cell formed on the first mother substrate and the colorfilter unit cell formed on the second mother substrate are formed viadifferent process from each other.

FIG. 2 is a schematic view showing a first mother substrate and thinfilm transistor unit cell regions formed on the first mother substrateaccording to the first exemplary embodiment.

Referring to FIG. 2, at least one thin film transistor unit cell regions20 is formed on the first mother substrate 10.

For example, a size of the first mother substrate 10 is about 1600mm×1400 mm. The first mother substrate 10 may includes a glass substratethat is transparent and has good heat-resisting property.

The thin film transistor unit cell region 20 is surrounded by a dottedline. For example, six thin film transistor unit cell regions 20 areformed on the first mother substrate 10. A thin film transistor unitcell 30 is formed in each of the thin film transistor unit cell regions20.

FIG. 3 is a schematic view showing a pixel electrode and a thin filmtransistor of a thin film transistor unit cell formed in the thin filmtransistor unit cell region of FIG. 2, and FIG. 4 is a cross-sectionalview showing a pixel electrode and a thin film transistor of FIG. 3.

Referring to FIGS. 3 and 4, a thin film transistor unit cell 30 includesat least one thin film transistor 40, a gate line 50, a data line 60 anda pixel electrode 70.

For example, when a resolution of a liquid crystal display device is1024×768, a number of the thin film transistors 40 formed on a thin filmtransistor unit cell region 20 of FIG. 2 are 1024×768×3. The thin filmtransistors 40 are arranged in a matrix shape on the thin filmtransistor unit cell region 20 of FIG. 2.

Referring to FIG. 4, the thin film transistor 40 includes a gateelectrode 42, a gate insulation layer 43, a source electrode 44, a drainelectrode 46 and a channel layer 48.

Referring again to FIG. 3, the gate line 50 is formed through the sameprocess of forming the gate electrode 42. The gate electrodes 42 of thethin film transistors 40 are electrically connected with each other viathe gate line 50.

The data line 60 is formed through the same process as in forming thesource electrode 44 and the drain electrode 46 of the thin filmtransistor 40. The source electrodes 44 of the thin film transistors 40are electrically connected with each other via the data line 60.

The pixel electrode 70 includes a material that has highlight-transmissivity and high electric conductivity. For example, thepixel electrode 70 includes indium tin oxide (ITO) or indium zinc oxide(IZO). One pixel electrode 70 are formed in each of the thin filmtransistor 40, and electrically connected with the drain electrode 46 ofthe thin film transistor 40.

FIG. 5 is a schematic view showing a second mother substrate and colorfilter unit cell regions formed on the second mother substrate accordingto the first exemplary embodiment.

Referring to FIG. 5, a size of the second mother substrate 80 is about1600 mm×1400 mm, for example. The second mother substrate 80 mayincludes a glass substrate that is transparent and has goodheat-resisting property.

A color filter unit cell region 90 is surrounded by a dotted line inFIG. 5. At least one color filter unit cell region 90 is formed on thesecond mother substrate 80. For example, six color filter unit cellregions 90 are formed on the second mother substrate 80. A color filterunit cell 100 is formed in each of the color filter unit cell regions90.

FIG. 6 is a cross-sectional view showing a portion of a color filterunit cell of FIG. 5.

Referring to FIG. 6, a color filter unit cell 100 of FIG. 5 includes acolor filter 110 and a common electrode 120.

The color filter 110 includes a red-color filter 112, a green-colorfilter 114 and a blue-color filter 116. The red-color filter 112 filterswhite light, so that only light having a wavelength corresponding to ared-color visible light may pass through the red-color filter 112. Thegreen-color filter 114 filters white light, so that only light having awavelength corresponding to a green-color visible light may pass throughthe green-color filter 114. The blue-color filter 116 filters whitelight, so that only light having a wavelength corresponding to ablue-color visible light may pass through the blue-color filter 116.Each of the red-color filter 112, the green color filter 114 and theblue color filter 116 faces the pixel electrode 70 of FIG. 3.

The common electrode 120 includes a material that has goodlight-transmissivity and good electric conductivity. For example, thecommon electrode 120 includes indium tin oxide (ITO) or indium zincoxide (IZO). The common electrode 120 is formed on the color filter 110and formed in the entire region of the color filter unit cell region 90of FIG. 5.

Referring again to FIG. 1, after the thin film transistor unit cell 30is formed on the first mother substrate 10, and the color filter unitcell 100 is formed on the second mother substrate 80, liquid crystalmolecules are aligned by a non-contact aligning method (step S200). Themolecular orientation of the liquid crystal is set by non-contactaligning method.

The non-contact aligning method solves the problem that occurs when theliquid crystal molecules are aligned by the conventional rubbing processusing a polyimide film as an alignment film.

The first mother substrate 10 including at least one thin filmtransistor unit cell 30 and the second mother substrate 80 including atleast one color filter unit cell 100 are erected to be disposed parallelto the gravitational force direction and transferred to a place wherenext process is carried out by auto guided vehicle (AGV) or manualguided vehicle (MGV).

The first mother substrate 10 and the second mother substrate 80 has alarge surface area, so that many problems such as sagging may happen dueto the large surface area of the first mother substrate 10 and thesecond mother substrate 80. Therefore, the first mother substrate 10 andthe second mother substrate 80 are erected and transferred so as tosolve the problems. For example, when the first mother substrate 10 andthe second mother substrate 80 is laid down to be disposed substantiallyperpendicular to the gravitational force direction and transferred, thefirst mother substrate 10 and the second mother substrate 80 may sag dueto the gravitational force, so that patterns formed on the thin filmtransistor unit cell 30 or on the color filter unit cell 100 is damagedand electrically shorted. This problem may be solved when the firstmother substrate 10 and the second mother substrate 80 are erected andtransferred. When the first mother substrate 10 and the second mothersubstrate 80 are erected and transferred, the sagging phenomenon of thefirst mother substrate 10 and the second mother substrate 80 may beminimized.

Further, when the first mother substrate 10 and the second mothersubstrate 80 are erected and transferred, the air that flows from aceiling of a clean room toward a bottom of the clean room makes minimalcontact with the first mother substrate 10 and the second mothersubstrate 80. Therefore, a contamination of the first mother substrate10 and the second mother substrate 80 is minimized when the first mothersubstrate 10 and the second mother substrate 80 are erected andtransferred.

Moreover, in most of equipments for manufacturing a liquid crystaldisplay device, a substrate is erected and loaded into the equipments,and then the substrate is laid down to be disposed perpendicular to thegravitational force direction before the substrate undergo any processin the equipments. Therefore, additional time for erecting the substrateso as to load the substrate into the equipment is needless when thesubstrate is transferred in an erected state.

Hereinafter, a non-contact aligning method and device for aligning theliquid crystal molecules are disclosed.

<First Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

In order to align liquid crystal molecules on the thin film transistorunit cell 30 of FIG. 2 or on the color filter unit cell 100 of FIG. 5,an alignment film and atomic beam to be applied to the alignment filmare needed.

FIG. 7 is a cross-sectional view showing an alignment film formed on thefirst mother substrate or the second mother substrate according to thefirst exemplary embodiment.

Referring to FIG. 7, an alignment film 130 includes adiamond-like-carbon thin film (DLC film) formed on surfaces of the thinfilm transistor unit cell and on the color filter unit cell. Thealignment film 130 may includes SiO₂, Si₃N₄ and TiO₂ aside from thediamond-like-carbon thin film.

Hereinafter, the diamond-like-carbon thin film is referenced by thereference numeral 130.

The diamond-like-carbon thin film 130 is used as an alignment filmbecause the diamond-like-carbon thin film 130 has carbon-carbon doublebond

When the carbon-carbon double bond of carbon atoms is broken into acarbon-carbon single bond, the carbon atoms have polarity to becomeradicals.

When liquid crystal molecules are disposed on the diamond-like-carbonthin film 130 including carbon radical, the liquid crystal molecule isself-aligned due to the diamond-like-carbon thin film 130 including thecarbon radical because the liquid crystal molecule has bothcharacteristics of crystal and liquid and has liquid crystal moleculardirector that aligns in accordance with external electromagnetic field.

In the present embodiment, an atomic beam induces the carbon radicals onthe surface of the diamond-like-carbon thin film 130. A pre-tilt angleaffects the viewing angle of the liquid crystal display device. When thepre-tilt angle of the liquid crystal molecules in a first region of aliquid crystal display panel is different from that of the liquidcrystal molecules in a second region of the liquid crystal displaypanel, spots are shown on the liquid crystal display panel displays, tothereby provide inferior image display.

In case the atomic beam induces the carbon radicals on thediamond-like-carbon thin film 130, when an angle between the atomic beamand a surface of the diamond-like-carbon thin film 130 varies accordingas, the pre-tilt angle of the liquid crystal molecules changes.Therefore, irradiation angle (or scanning angle) of atomic beam isrelated with display quality.

FIG. 8 is a flow chart showing a method of aligning liquid crystal on analignment film by a non-contact method according to the first exemplaryembodiment of the present invention.

Referring to FIG. 8, in order to align liquid crystal molecules on adiamond-like-carbon thin film by a non-contact alignment method, a firstion beam is generated (step S205).

FIG. 9 is a flow chart showing a method of generating a first ion beamof FIG. 8.

Referring to FIG. 9, in order to generated a first ion beam, a sourcegas is supplied (step S206) and the source gas is dissociated to be ions(step S207). Then, the ions are accelerated (step S208).

For example, an argon (Ar) gas is used as a source gas. The argon gasmay be dissociated into argon ions by plasma-generating electric fieldor at a high temperature higher than about 2500K.

In the present embodiment, the argon gas is dissociated at a temperaturehigher than about 2500K.

When the source gas is dissociated and is transformed into ions, theions of the source gas are accelerated toward the target (step S208).When a voltage having opposite polarity to the polarity of the ions isapplied to the target, the ions of the source gas are accelerated.

For example, the argon ions has positive (+) polarity, negative (−)voltage is applied to the diamond-like-carbon thin film so as toaccelerate the argon ions.

The argon ions are attracted toward the diamond-like-carbon thin filmhaving negative (−) voltage in accordance with coulomb's law. The largeran absolute value of the voltage applied to the diamond-like-carbon thinfilm becomes, the faster are accelerated the argon ions.

When the first ion beam passes through an aperture of an ion beamgenerating device, an irradiation angle of the ion beam formed withrespect to a surface of the diamond-like-carbon thin film is controlled.A shape of the cross-section of the second ion beam depends on a shapeof the aperture of the ion beam-generating device.

However, when the first ion beam is directly applied to thediamond-like-carbon thin film, it is hard to control an irradiationangle of the first ion beam with respect to the diamond-like-carbon thinfilm.

Therefore, the first ion beam is transformed into a second ion beam(step S210) as shown in FIG. 8.

The first ion beam is transformed into the second ion beam by anelectronic method or by a physical method. The second ion beam has aband shape that has a rectangular cross-section.

In order to generate the second ion beam having the above shape, thefirst ion beam is allowed to pass through a housing of which an entranceis broad and of which an outlet has a rectangular shape.

The angle of the second ion beam with respect to the surface of thediamond-like-carbon thin film determines the pre-tilt angle of theliquid crystal molecules. The angle of the second ion beam with respectto the surface of the diamond-like-carbon thin film is in a range fromabout 0° to about 90°. For example, when the liquid crystal is twistednematic liquid crystal, the angle of the second ion beam with respect tothe surface of the diamond-like-carbon thin film is in the range fromabout 0° to about 45°. When the liquid crystal is vertically aligned invertical alignment mode, the angle of the second ion beam with respectto the surface of the diamond-like-carbon thin film is in the range fromabout 45° to about 90°, preferably in the range from about 80° to about90°.

Referring again to FIG. 8, the second ion beam advancing toward thediamond-like-carbon thin film 130 is transformed into an atomic beam(step S215). Direction and speed of the atomic beam are substantiallythe same as in the second ion beam.

Electrons are supplied to the second ion beam so that ions of the secondion beam are transformed into the source gas that is electricallyneutral. The ions of the second ion beam are very unstable. Therefore,the ions accept electron to be transformed into an atomic beam that iselectrically neutral and stable.

The atomic beam whose cross-section is rectangular is irradiated ontothe diamond-like-carbon thin film since the atomic beam maintains thesame shape as the second ion beam. Therefore, the atomic beam is scannedon the diamond-like-carbon thin film in order to be irradiated to theentire diamond-like-carbon thin film 130 (step S220).

In order to scan the atomic beam on the diamond-like-carbon thin film130, the atomic beam may move while the position of thediamond-like-carbon thin film is unchanged, or the diamond-like-carbonthin film may be moved while the beam source position of the atomic beamis unchanged.

In the exemplary embodiments of the present invention, the atomic beammoves while the position of the diamond-like-carbon thin film isunchanged.

FIG. 10 is a schematic view showing a non-contact alignment deviceaccording to the first exemplary embodiment, and FIG. 11 is a schematicview showing a first ion beam generating module, a second ion beamgenerating module and an atomic beam generating module of FIG. 10.

Referring to FIG. 10, a non-contact alignment apparatus for aligningliquid crystal molecules includes a first ion beam generating module150, a second beam generating module 160, an atomic beam generatingmodule 170 and a transfer module 180.

Referring to FIG. 11, the first ion beam generating module 150 includesa first ion beam housing 152, a source gas supplying unit 154, a sourcegas dissociation unit 156 and an ion acceleration unit 158.

The first ion beam housing 152 provides a space in which a first ionbeam is generated. The space is isolated from outside. The first ionbeam housing 152 includes an ion generation region and an ionacceleration region.

The ion generating region of the first ion beam housing 152 is connectedwith the source gas supplying unit 154. The source gas supplying unit154 provides the first ion beam housing 152 with argon (Ar) gas via apipe 155. The argon has a heavy atomic weight. Therefore, the argoneasily breaks the carbon-carbon double bond when the argon isaccelerated.

The source gas dissociation unit 156 dissociates the argon gas suppliedfrom the source gas supplying unit 154. The source gas dissociation unit156 may have various elements.

For example, the source gas dissociation unit 156 may include a cathodeelectrode, an anode electrode and a power supply for applying power tothe cathode electrode and the anode electrode.

The power supply applies a predetermined voltage to the cathodeelectrode and the anode electrode so that the argon gas is dissociatedto argon ions and electrons.

The source gas dissociation unit 156 may include a tungsten (W) filament156 a that emits electrons, a power supply 156 b for heating thetungsten filament 156 a.

The tungsten filament 156 a emits electrons when the tungsten filament156 a is heated at a temperature higher than about 2500K. The electronsemitted from the tungsten filament 156 a collide with the argon atom, sothat the argon atom is transformed into argon ion. The ion accelerationunit 158 is installed in the ion acceleration region of the first ionbeam housing 152. The ion acceleration unit 158 accelerates the argonions to have enough speed for the argon ions to break the carbon-carbondouble bond of the diamond-like-carbon thin film.

The ion acceleration unit 158 includes an ion acceleration electrode 158a having a mesh structure, and a first power supply 158 b for applyingvoltage having a polarity that is opposite to that of the ions so as tothe ion acceleration electrode 158 a. For example, when the ions havinga positive polarity is generated in the first ion beam housing 152 bythe source gas dissociation unit 156, the first power supply 158 bapplies negative voltage to the ion acceleration electrode 158 a. Then,coulomb force accelerates the ions having positive polarity toward theion acceleration electrode 158 a.

The speed of the ions is adjusted in accordance with magnitude of thevoltage applied to the ion acceleration electrode 158 a.

When the voltage is too high, the ions has enough energy so that theatomic beam penetrate the surface of the diamond-like-carbon thin filmand to be implanted into the diamond-like-carbon thin film. When thevoltage is too low, the ions may not have enough energy so that theatomic beam does not break the carbon-carbon double bond of thediamond-like-carbon thin film. Therefore, the voltage has a proper levelsuch that the atomic beam is not implanted into the diamond-like-carbonthin film and does not break the carbon-carbon double bond of thediamond-like-carbon thin.

As described above, the first ion beam that is generated from the firstion beam generating module 150 is accelerated by the ion accelerationelectrode 158 a, and advances toward the second ion beam generatingmodule 160.

The second ion beam generating module 160 includes a second ion beamhousing 162, a second ion beam generating body 164, a first ion beamacceleration device 166 and a second power supply 168.

The second housing 162 includes non-conducting material to beelectrically insulated from the first ion beam housing 152. The secondion beam generating body 164 is installed on the second ion beam housing162. The second ion beam generating body 164 includes a first ion beaminlet 164 a through which the first ion beam enters and an second ionbeam outlet 164 b through which the second ion beam exits.

The first ion beam inlet 164 a is large so that the first ion beameasily enters the second ion beam generating module 160. The first ionbeam inlet 164 may have various shapes. The first ion beam accelerationdevice 166 is installed at the first ion beam inlet 164 a. The first ionbeam acceleration device 166 includes conductive material. The secondpower supply 168 provides the first ion beam acceleration device 166with a power voltage opposite to the polarity of the first ion beam. Thefirst ion beam acceleration device 166 disposed at the first ion beaminlet 164 a accelerates the first ion beam again.

The second ion beam outlet 164 b has a rectangular shape. A width of thesecond ion beam outlet 164 b is narrow, and a length of the second ionbeam outlet 164 b is long. The first ion beam enters the first ion beaminlet 164 a and arrives at the second ion beam outlet 164 b. Thecross-section of the first ion beam has a rectangular figure when thefirst ion beam passes through the second ion beam outlet 164 b. Thesecond ion beam exits from the second ion beam outlet 164 b.

An atomic beam generating module 170 is installed in an atomic beamgenerating region. In detail, the atomic beam generating module 170 isinstalled adjacent to the second ion beam housing 162. The atomic beamgenerating module 170 includes an electron generating unit 172 and anelectron accelerating unit 174. The electron generating unit 172generates electrons. The electron accelerating unit 174 moves theelectron.

The electron generating unit 172 includes a tungsten filament 172 a anda third power supply 172 b. The third power supply 172 b provides thetungsten filament 172 a with power voltage such that the tungstenfilament 172 a is heated and has temperature higher than about 2500 K,and electrons are emitted from the tungsten filament 172 a.

The electron accelerating unit 174 faces the electron generating unit172. The electron accelerating unit 174 attracts the electrons generatedfrom the electron generating unit 172 by coulomb force.

The electron accelerating unit 174 includes a fourth power supply 174 aand an electrode 174 b. The fourth power supply 174 a applies positive(+) voltage opposite to the polarity of the electron to the electrode174 b.

The electron generated from the electron generating unit 172 movestoward the electron accelerating unit 174. A path of the electronintersects a path of the second ion beam. The ions of the second ionbeam combines with the electrons generated from the electron generatingunit 172. Therefore, the argon ion is transformed into argon atom (Ar)such that an argon atomic beam is generated. The argon ions of thesecond ion beam has substantially the same speed as that of the argonatoms of the argon atomic beam, and the second ion beam moves in thesame direction as in the argon atomic beam. Hereinafter, the source gasthat moves in the same speed and direction as those of the second ionbeam is referred to as an atomic beam.

The atomic beam generated from the atomic beam generating module 170 hasa rectangular cross-section and is irradiated onto a portion of thediamond-like-carbon thin film. In order that the atomic beam isirradiated onto the entire diamond-like-carbon thin film, the atomicbeam moves while the diamond-like-carbon thin film is fixed, or thediamond-like-carbon thin film is transferred while the atomic beam isfixed.

The transfer module 180 moves relatively with respect to a combined bodyincluding the first ion beam generating module 150, the second ion beamgenerating module 160 and the atomic beam generating module 170.

In the non-contacting alignment device 140 described above, which alignsthe liquid crystal molecules by non-contact alignment method, the atomicbeam forms an angle in the range from about 0° to about 90° with respectto the diamond-like-carbon thin film.

When the liquid crystal is twist nematic liquid crystal, the atomic beamforms an angle in the range from about 0° to about 45°.

When the liquid crystal is vertically aligned in the vertical alignmentmode, the atomic beam forms an angle in the range from about 45° toabout 90°, preferably, in the range from about 80° to about 90°.

The non-contact alignment device 140 may have at least two second ionbeam outlets 164 b so as to provide at least two atomic beams. Thenon-contacting alignment device 140 may generate a plurality of atomicbeams, each of which advances toward the diamond-like-carbon thin filmand is incident onto the diamond-like-carbon thin film to form differentangles with respect to the diamond-like-carbon thin film. Therefore, theangle between the atomic beam and the diamond-like-carbon thin film maybe changed.

As shown in FIG. 12, a device for forming the diamond-like-carbon thinfilm forms the diamond-like-carbon thin film on a mother substrate, andthe mother substrate is transferred to the device for forming thediamond-like-carbon thin film, and the liquid crystal molecules arealigned by the non-contact alignment device 140. Namely, thediamond-like-carbon thin film and the liquid crystal molecules may beprocessed by an in-situ process. FIG. 12 is a schematic view showing anon-contact alignment device and a device for forming adiamond-like-carbon thin film.

The device 190 for forming the diamond-like-carbon thin film includes achamber 191, a substrate supporting unit 192 for supporting a firstmother substrate 10 or a second mother substrate 80, a reaction gassupplying module 193, a vacuum pump 194 and a plasma generator.

The substrate supporting unit 192 is disposed in the chamber 191. Thefirst mother substrate 10 having the thin film transistor unit cell 30of FIG. 2 is transferred and disposed on the substrate supporting unit192. The second mother substrate 80 having the color filter unit cell100 of FIG. 5 is transferred and disposed on the substrate supportingunit 192.

The reaction gas supplying module 193 may provide the chamber 191 withHelium (He), Hydrogen (H₂), Methane (CH₄) or Acetylene (C₂H₂).

The vacuum pump 194 provides the chamber 191 with a high-vacuum of about60 Torr. Therefore, impurities or gas except for reaction gas may not beparticipated in a process of forming diamond-like-carbon thin film.

The plasma generator forms diamond-like-carbon thin film with reactiongas. The plasma generator includes a cathode electrode 195, an anodeelectrode 196 and a power supply 197. The high voltage is appliedbetween the cathode electrode 195 and the anode electrode 196, so thatthe Helium or the Argon gas is ionized.

The device 190 for forming diamond-like-carbon thin film may be combineddirectly with the alignment device 140.

In contrast, a load lock chamber 200 may installed between the device190 and the alignment device 140. The first mother substrate 10 or thesecond mother substrate 80 stands by temporarily in the load lockchamber 200.

When the device 190 for forming the diamond-like-carbon thin film, theload lock chamber 200 and the alignment device 140 are installed so thatthe diamond-like-carbon thin film and the liquid crystal molecules maybe processed by a in-situ process, the time for aligning liquid crystalmolecules is reduced. Further, contamination of the first mothersubstrate 10 and the second mother substrate 80 is reduced.

<Second Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 13 is a flow chart showing a method of aligning liquid crystal by anon-contact method according to a second exemplary embodiment.

In previous procedure, the diamond-like-carbon thin film havingcarbon-carbon double bond is formed on the first substrate 10 having thethin film transistor unit cell 30 of FIG. 2 or on the second substrate80 having the color filter unit cell 100 of FIG. 5. Thediamond-like-carbon thin film is formed via chemical vapor deposition(CVD).

Referring to FIG. 13, the atomic beam collides with thediamond-like-carbon thin film, so that a polarized functional group foraligning liquid crystal molecules is generated (step S225).

FIG. 14 is a flow chart showing a method of generating a polarizedfunctional group in the diamond-like-carbon thin film according to thesecond exemplary embodiment.

Referring to FIG. 14, a first ion beam is generated and acceleratedtoward the diamond-like-carbon thin film (step S226).

Then, the first ion beam is transformed into a second ion beam of whichcross-section is square shaped (step S227). A speed of the second ionbeam is similar to a speed of the first ion beam. The second ion beamforms an angle in the range from about 0° to about 90° with respect tothe diamond-like-carbon thin film.

When the second ion beam advances toward the diamond-like-carbon thinfilm, the second ion beam collides with electrons that intersect thesecond ion beam, so that the second ion beam is transformed into theatomic beam (step S228). The speed and direction of the second ion issubstantially preserved, because the mass of the ion is much larger thanthat of the electron. Therefore, the speed and the direction of theatomic beam are substantially equal to the speed and the direction ofthe second ion beam.

The atomic beam arrives at a surface of the diamond-like-carbon thinfilm and collides with the diamond-like-carbon thin film. The atomicbeam scans the surface of the diamond-like-carbon thin film (step S229).

The atomic beam that collides with the diamond-like-carbon thin filmchanges the surface of the diamond-like-carbon thin film. In detail, theatomic beam breaks the carbon-carbon double bond to generate sub-chainthat has a carbon-carbon single bond structure and radical state.Namely, the radical formed in diamond-like-carbon thin film formspolarized functional group for aligning liquid crystal molecules.

The polarized functional group is very unstable. Therefore, thepolarized functional group tends to regenerate the carbon-carbon doublebond structure.

When the stable carbon-carbon singlebond structure is restored to theunstable carbon-carbon double bond structure, the polarized functionalgroup generated in the diamond-like-carbon thin film disappears.

When the polarized functional group for aligning liquid crystal moleculeis not shown, the liquid crystal molecules may not maintain the pre-tiltangle, so that display quality of the liquid crystal display device isdeteriorated.

Therefore, in order to maintain the display quality of the liquidcrystal display device, the polarized functional group for aligningliquid crystal molecule should remain permanently on thediamond-like-carbon thin film.

Therefore, after the polarized functional group is generated, thepolarization preserving substance is combined with the polarizedfunctional group such that the polarized functional group existspermanently on the diamond-like-carbon thin film (step S230).

When the carbon-carbon double bond is broken, carbon-carbon single bondand sub-chain are generated. In order that the polarized functionalgroup exists permanently, the sub-chain is combined with otherfunctional group.

FIG. 15 is a flow chart showing a process of introducing a hydroxylradical (OH⁻) into the polarized functional group.

In order that the polarized functional group exists permanently, asub-chain of the polarized functional group combines with hydroxylradical (—OH), so that a C—OH bond is formed in the diamond-like-carbonthin film.

Firstly, deionized water (DI water) is heated into a vapor (step S231).The vapor is applied onto the surface of the diamond-like-carbon thinfilm (step S232).

Heating the deionized water to form the vapor is not essential but thedeionized water that is vaporized activates the combination of thedeionized water and the sub-chain.

When the hydroxyl radical (—OH) is combined with the sub-chain of thediamond-like-carbon thin film, the sub-chain may not be recombined withcarbon. Therefore, the carbon atoms on the diamond-like-carbon thin filmhave carbon-carbon single bonds, so that the polarized functional groupthat is electrically unstable is maintained.

According to an embodiment described above, the polarized functionalgroup that is combined with the hydroxyl radical (—OH) prevents thediamond-like-carbon thin film from being electrically neutralized.

<Third Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 16 is a flow chart showing a process of introducing a hydrogen ioninto the polarized functional group according to a third exemplaryembodiment of the present invention.

Deionized water is supplied to the surface of the diamond-like-carbonthin film in order that hydrogen ion (H⁺) is combined with the sub-chain(step S233).

Then, ultra-violet ray is irradiated onto the surface of thediamond-like-carbon thin film in order that the hydrogen ion (H⁺) iscombined with the sub-chain (step S234).

When the ultra-violet ray is irradiated on the deionized water, twohydrogen ions and one oxygen ion are generated as shown in the followingchemical formula.

<Chemical Formula 1>H2O→2H⁺+O⁻²

The hydrogen ion (H⁺) dissociated by the ultra-violet ray is combinedwith the sub-chain to form a C—H bond.

When the hydrogen ion (H⁺) is combined with the sub-chain formed in thediamond-like-carbon thin film in which the polarized functional group isformed, the sub-chain may not be recombined with a carbon atom.Therefore, the electrically unstable polarized functional group that iselectrically unstable remains in the diamond-like-carbon thin film.

Bonding the hydrogen ion (H⁺) with the sub-chain by the ultra-violet rayand the deionized water may be carried out at a low temperature.

In contrast, when the hydrogen gas passes through a region havingtemperature higher than 2500K, protons (H⁺) and electrons (e⁻) aredissociated from the hydrogen gas. The protons (H⁺) may be combined withthe sub-chain to form the C—H bond.

<Fourth Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 17 is a flow chart showing a process of introducing a nitrogen ioninto the polarized functional group according to a fourth exemplaryembodiment of the present invention.

Nitrogen ion (N⁻) is combined with the sub-chain formed in thediamond-like-carbon thin film by the atomic beam in order that thepolarized functional group may remain on the diamond-like-carbon thinfilm.

Nitrogen gas (N₂) is provided (step S235) and the nitrogen gas isdissociated to form the nitrogen ion (N⁻) (step S236). A voltage higherthan the ionization voltage of the nitrogen is applied to the nitrogengas (N₂), so that the nitrogen ion (N⁻) is formed.

The nitrogen ion (N⁻) is combined with the polarized functional groupformed in the diamond-like-carbon thin film to form a C—N bond (stepS237).

When the nitrogen ion (N⁻) is combined with the sub-chain, the sub-chainmay not be recombined with a carbon atom, and the carbon atoms maintaina carbon-carbon single bond. Therefore, the polarized functional groupthat is electrically unstable is maintained.

In above described first embodiment to third embodiment, the hydroxylradical, the hydrogen ion or the nitrogen ion is combined with thepolarized functional group so as to maintain the polarized functionalgroup.

Hereinafter, a device for non-contact alignment of liquid crystalaccording to the second exemplary embodiment of non-contact aligning ofliquid crystal molecule is shown.

<Fifth Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 18 is a schematic view showing a non-contact alignment deviceaccording to a fifth exemplary embodiment of the present invention.

Referring to FIG. 18, a non-contact alignment device 210 fornon-contacting aligning liquid crystal molecule includes an atomic beamirradiating part 220 and polarity maintaining part 240.

Further, the non-contact alignment device 210 may includes a thin filmforming part 230 for forming a diamond-like-carbon thin film on thefirst mother substrate 10 or on the second mother substrate 80.

Referring to FIG. 18, the thin film forming part 230 includes a chamber231, a substrate supporting unit 232, a reaction gas supplying module233, a vacuum pump 234 and a plasma generator having a cathode electrode235, an anode electrode 236 and a power supply 237.

The substrate supporting unit 232 is disposed in the chamber 231. Thefirst mother substrate 10 on which thin film transistor unit cells areformed, and the second mother substrate 80 on which color filter unitcells are formed are supported by the substrate supporting unit 232.

The reaction gas supplying module 233 supplies the chamber 231 withreaction gas such as helium (He), argon (Ar), Hydrogen (H₂), methane(CH₄) or acetylene (C₂H₂).

The vacuum pump 234 generates a high vacuum that is about 60 Torr in thechamber 231, such that the other gas except for the reaction gas may notparticipate in the process for forming the diamond-like-carbon thinfilm.

The diamond-like-carbon thin film is formed with the reaction gas by theplasma generator.

The plasma generator includes the cathode electrode 235, the anodeelectrode 236 and the power supply 237. A sufficient voltage is appliedbetween the cathode electrode 235 and the anode electrode 236, such thatthe helium (He) or argon (Ar) may be ionized.

The thin film forming part 230 may be directly combined with the atomicbeam irradiating part 220.

However, a load lock chamber 289 may be interposed between the thin filmforming part 230 and the atomic beam irradiating part 220. The firstmother substrate 10 or the second mother substrate 80 stand by in theload lock chamber 289 as shown in FIG. 18.

When the thin film forming part 230, the load lock chamber 289, theatomic beam irradiating part 220 and the polarity maintaining part 240are combined in series, a procedure for aligning a liquid crystalmolecule needs reduced time and contamination of the first mothersubstrate 10 and the second mother substrate 80 is reduced.

The first mother substrate 10 or the second mother substrate 80 on whichthe diamond-like-carbon thin film is formed is transferred to the atomicbeam irradiating part 220.

Atomic beam generated from the atomic beam irradiating part 220 collideswith the diamond-like-carbon thin film formed on the first mothersubstrate 10 or the second mother substrate 80, and a carbon-carbondouble bond is broken, so that a carbon-carbon single bond and sub-chainare formed in the diamond-like-carbon thin film. Therefore, thepolarized functional group for aligning liquid crystal molecule isformed.

The polarity maintaining part 240 maintains the polarized functionalgroup, such that the polarized functional group remains in thediamond-like-carbon thin film.

Hereinafter, various polarity maintaining parts 240 are disclosed.

Referring to FIG. 18, the polarity maintaining part 240 includes achamber 241, a water supplying module 242 and a spraying module 243.

A process for maintaining polarized functional group is performed in thechamber 241.

The supplying module 243 supplies the chamber 241 with deionized water.The supplying module 243 may further includes a heating unit 244 forheating the deionized water to be transformed into vapor.

The spraying module 243 sprays the deionized water or the vapor onto thefirst mother substrate 10 or on the second mother substrate 80uniformly. The spraying module 243 includes a spaying nozzle 243 a.

<Sixth Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 19 is a schematic view showing a non-contact alignment deviceaccording to a sixth exemplary embodiment of the present invention.

Referring to FIG. 19, the polarity maintaining part 250 includes a watersupplying part 260 and a ultra-violet irradiating part 270.

The water supplying part 260 includes a chamber 261, a water supplyingmodule 262 and a spraying module 263.

Water is sprayed on the diamond-like-carbon thin film in the chamber261. The water supplying module 262 supplies the chamber 261 with thewater. The spraying module 263 sprays the water or vapor on the firstmother substrate 10 or on the second mother substrate 80 uniformly. Thespaying module 263 includes a spraying nozzle 263 a.

The ultra-violet irradiating part 270 includes a chamber 271 and aultra-violet irradiating module 272. The ultra-violet irradiating module272 irradiates ultra-violet beam onto the diamond-like-carbon thin film.The ultra-violet beam dissociates the water into hydrogen ion (H⁺) andoxygen ion (O²⁻). The hydrogen ion (H⁺) is combined with the sub-chainformed in the diamond-like-carbon thin film.

The sub-chain is combined with the hydrogen ion (H⁺). Therefore, thesub-chain may not recombine with carbon atom. Therefore, the polarizedfunctional group is maintained.

The dissociation of the water into hydrogen ion (H⁺) and oxygen ion(O²⁻) may be performed at the room temperature.

A thin film forming part 230 and an atomic beam irradiating part 220 arethe same as those disclosed in FIG. 18. Therefore, the description ofthe identical elements is omitted.

<Seventh Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 20 is a schematic view showing a non-contact alignment deviceaccording to seventh exemplary embodiment of the present invention.

Referring to FIG. 20, a polarity maintaining part 280 includes a chamber281, a hydrogen supplying module 283, a hydrogen dissociation module285.

A vacuum pump 284 maintains the low-pressure of about 60 Torr in thechamber 281, so that the other gases except for reaction gas may notparticipate in the process for forming the diamond-like-carbon thinfilm.

In particular, material for maintaining polarized functional group isunstable material such as hydrogen, the pressure of the chamber 281 ismaintained at a low pressure.

The hydrogen supplying module 283 supplies the chamber 281 with apredetermined amount of hydrogen gas.

The hydrogen dissociation module 285 transforms the hydrogen gas intohydrogen ion.

The hydrogen dissociation module 285 includes a heater 287 and a powersupply 286. The heater 287 heats the hydrogen gas, such that atemperature of the hydrogen gas is higher than about 2500K. The powersupply 286 supplies the heater 287 with power.

The heater 287 includes tungsten (W), and the heater 287 has amesh-shape.

When the hydrogen gas is heated, such that the temperature of thehydrogen gas is higher than about 2500K, the hydrogen gas is dissociatedinto hydrogen ions and electrons.

The hydrogen ions are combined with sub-chain formed in thediamond-like-carbon thin film, so that C—H bond is formed.

When the hydrogen ions are combined with the sub-chain, the sub-chainmay not be recombined with carbon atoms, so that the polarizedfunctional group is maintained.

A thin film forming part 230 and an atomic beam irradiating part 220 areidentical element disclosed in FIG. 18. Therefore, the description ofthe identical elements is omitted.

<Eighth Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 21 is a schematic view showing a non-contact alignment deviceaccording to a eighth exemplary embodiment of the present invention.

Referring to FIG. 21, a polarity maintaining part 290 includes a chamber291, a nitrogen supplying module 293, a nitrogen dissociation module295.

Vacuum pump 294 maintains a low-pressure in the chamber 281, so that theother gases except for reaction gas may not participate in the processfor forming the diamond-like-carbon thin film.

The nitrogen supplying module 293 supplies the chamber 291 with apredetermined amount of nitrogen gas.

The nitrogen dissociation module 295 transforms the nitrogen gas intonitrogen ion.

The nitrogen dissociation module 295 includes a heater 297 and a powersupply 296. The heater 297 heats the nitrogen gas, such that atemperature of the nitrogen gas is higher than about 2500K. The powersupply 296 supplies the heater 297 with power.

The heater 297 includes tungsten (W), and the heater 297 has amesh-shape.

When the nitrogen gas is heated, such that the temperature of thenitrogen gas is higher than about 2500K, the nitrogen gas is dissociatedinto nitrogen ions and electrons.

The nitrogen ions are combined with sub-chain formed in thediamond-like-carbon thin film, so that C—N bond is formed.

When the nitrogen ions are combined with the sub-chain, the sub-chainmay not be recombined with carbon atoms, so that the polarizedfunctional group is maintained. A thin film forming part 230 and anatomic beam irradiating part 220 are identical element disclosed in FIG.18. Therefore, the description of the identical elements is omitted.

In the above-described <First embodiment of non-contact type alignmentof liquid crystal molecules> to <Eighth embodiment of non-contact typealignment of liquid crystal molecules>, the atomic beam forms thepolarized functional group in the diamond-like-carbon thin film, foraligning liquid crystal molecule.

A direction of the atomic beam and a cross-sectional shape of the atomicbeam are important, because the direction and the cross-sectional shapeinfluence a pre-tilt angle of the liquid crystal molecule.

<Ninth Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 22 is a flow chart showing a method for generating an atomic beamaccording to a ninth exemplary embodiment of the present invention.

Referring to FIG. 22, firstly ion is formed (step S235). A source gas isdissociated to form the ion. Argon (Ar) gas may be used for the sourcegas. The argon gas is one of the inert gases that have low chemicalactivity and that may not be included in any chemical compound, and theargon gas is heavy, so that the argon gas may apply a large impact onthe carbon-carbon double bond and break the carbon-carbon double bond.

In order to obtain the ion from the source gas, two methods are used.

Firstly, when voltage is applied to the source gas, the source gas isdissociated into ions, electrons and neutron. Secondly, when the sourcegas is heated, such that the temperature of the source gas is higherthan 2500K, the source gas is dissociated, and ions are formed.

When the ions are formed, the ions are accelerated to form a first ionbeam (step S240). A first electrode has opposite polarity to thepolarity of the ions, and the first electrode attracts the ions, so thatthe ions are accelerated.

Then the ion beam is transformed into a second ion beam of whichcross-section has rectangular or circular shape (step S245).

The shape of the cross-section of the second ion beam influences thealignment quality of liquid crystal molecules.

The cross-section of the second ion beam may have a rectangular shape. Awidth of the rectangular second ion beam determines an interval of thealigned liquid crystal molecules. The smaller the width is, the smalleris the interval.

The first ion beam is focused to form the second ion beam. The first ionbeam is a flow of ions, not a flow of photons. Light, as a flow of thephotons, may be focused by lens, but the first ion beam may not befocused by lens because the progress of the first ion beam may beinterrupted by the lens. A housing focuses the first ion beam. An areaof an inlet of the housing is large, but an area of an outlet of thehousing is small and rectangular shaped. Therefore, when the ion beampasses through the housing, the first ion beam is focused. A secondelectrode that has polarity opposite to the polarity of the first ionbeam is formed adjacent to the outlet, so that the first ion beam isaccelerated.

After the second ion beam is formed, electrons are combined with thesecond ion beam so that the atomic beam is formed (step S250). Electronsintersect the second ion beam, such that electrons are combined with thesecond ion beam.

The atomic beam may be used in various fields. For example, atomic beamthat is electrically neutral is injected into a thin film to changecharacteristics of the thin film, or the atomic beam is used formaintaining a pre-tilt angle of the liquid crystal molecule.

<Tenth Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 23 is a schematic view showing an atomic beam generating deviceaccording to a tenth exemplary embodiment of the present invention.

Referring to FIG. 23, an atomic beam generating device 300 includes anion generating part 310, a first ion beam generating part 320, a secondion beam generating part 330 and an atomic beam generating part 340.

The ion generating part 310 includes a chamber 312, a source gassupplying unit 314 and a source gas dissociation unit 316.

The chamber 313 provides a space in which ions are formed. The chamber312 has opening 312, so that the ions advance through the opening 313.

The opening 313 may have a circular shape or a rectangular shape thathas width and length. The length is larger than the width.

The source gas supplying unit 314 and the source gas dissociation unit316 are formed in the chamber 312.

The source gas supplying unit 314 supplies the chamber 312 with argon(Ar) gas. The argon gas is one of the inert gases that have low chemicalactivity and that may not be included in any chemical compound, and theargon gas is heavy, so that it is proper to impact on the carbon-carbondouble bond formed between two carbon atoms and to break thecarbon-carbon double bond.

The source gas dissociation unit 316 dissociates the argon gas.

The source gas dissociation unit 316 may include a cathode electrode, ananode electrode and a power supply 318.

The source gas dissociation unit 316 may include a tungsten filament 317for heating the source gas such as argon gas, and a power supply forsupplying the tungsten filament 317 with power voltage. The source gasdissociation unit 316 heats the source gas, such that temperature of theargon gas becomes higher than about 2500K. When the source gas isheated, so that the temperature of the source gas becomes higher thanabout 2500K, the source gas is dissociated into ions.

The first ion beam generating part 320 accelerates the ions. The firstion beam generating part 320 includes a first electrode 322 and a firstpower supply 324 for supplying the first electrode 322 with power.

The first electrode 322 has a mash-shape. The first electrode 322attracts the ions, so that the ions are accelerated and pass through thefirst electrode 322.

The first power supply 324 applies voltage that has polarity opposite tothe ion to the first electrode 322.

The absolute value of the voltage determines the magnitude ofacceleration. When the absolute value becomes larger, the magnitude ofacceleration becomes larger. The larger the absolute value of thevoltage is, the larger is the magnitude of acceleration.

The second ion beam generating part 330 modulates a shape of the firstion beam. In detail, the second ion beam generating part 330 reducescross-sectional area of the first ion beam, while not reducing theamount of the first ion beam. Therefore, the second ion beam generatingpart 330 focuses the first ion beam.

The second ion beam generating part 330 includes a second ion beamhousing 332, a second electrode 334 and a second power supply 336.

The second ion beam housing 332 has a hollow prism shape that has threefaces. The second ion beam housing 332 has a hollow. A first ion beaminlet 333 a is formed on a face of the second ion beam housing 332 thatfaces the first ion beam generating part 320. A second ion beam outlet333 b is formed on an edge of the second ion beam housing 332 that facesthe first ion beam inlet 333 a. The first ion beam is focused by thesecond ion beam outlet 333 b and exits though the second ion beam outlet333 b to form a second ion beam.

The second electrode 334 is installed in the first ion beam inlet 333 aof the second ion beam housing 332. The second electrode 334 has amesh-shape and includes conductive material.

The second power supply 336 provides the second electrode 334 withvoltage, which has polarity opposite to the polarity of the first ionbeam, so that the first ion beam is accelerated once more.

The atomic beam generating part 340 includes an electron generating unit342 and an electron accelerating unit 346.

The electron generating unit 342 includes a tungsten filament 343 andpower supply 344 for applying power voltage to the tungsten filament343. The tungsten filament 343 is heated by the power supply 344. When atemperature of the tungsten filament 343 is above about 2500K, electronsare emitted from the tungsten filament 343.

The electron accelerating unit 346 includes an electron accelerationelectrode 347 and power supply 348 for supplying the electronaccelerating unit 346 with power voltage. The electron accelerating unit346 faces the tungsten filament 343 and attracts the electrons generatedfrom the tungsten filament 343 so that electron beam is formed.

The electron generating unit 342 and the electron accelerating unit 346are disposed, such that a virtual line connecting the electrongenerating unit 342 with the electron accelerating unit 346 intersectsthe direction of advancing of the second electron beam. Therefore,electron beam generated from the electron generating unit 342 andaccelerated by the electron accelerating unit 346 intersects the secondion beam. The electrons of the electron beam are combined with thesecond ion beam, so that the second ion beam is transformed into theatomic beam that has substantially the same speed and direction as thoseof the second ion beam.

A sequence of the first ion beam generating part and the second ion beamgenerating part 330 may be changed. Only the second ion beam generatingpart 330 may be disposed between the ion generating part 310 and theatomic beam generating part 340. The second ion beam generating part 330may have various shapes. The first ion beam inlet 333 a may have acircular shape, and the second ion beam outlet 333 b may have arectangular shape.

<Eleventh Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 24 is a flow chart showing a non-contact aligning method ofaligning liquid crystal molecule on an alignment film according toeleventh embodiment of the present invention, FIG. 26 is across-sectional view showing a transparent thin film formed on a mothersubstrate, and FIG. 27 is a cross-sectional view showing a carbonpolymer formed on the transparent thin film of FIG. 26.

Referring to FIGS. 24, 26 and 27, a transparent thin film 365 is formedon the thin film transistor unit cell 30 of the first mother substrate10 so as to align liquid crystal molecule on the first mother substrate10. The transparent thin film 365 is formed also the color filter unitcell 100 of the second mother substrate 80 so as to align liquid crystalmolecule on the second mother substrate 80 (step S255).

Firstly, the first mother substrate 10 or the second mother substrate 80are loaded in vacuum space that is sealed in order to form thetransparent thin film. Amorphous silicon thin film may be used as thetransparent thin film.

In order to form the transparent thin film on the first mother substrate10 or on the second mother substrate 80 in the sealed vacuum space,silane gas (SiH₄) and hydrogen gas is provided in the space. Then, thesilane gas and the hydrogen gas are reacted with each other to formamorphous silicon. The amorphous silicon is deposited on the thin filmtransistor unit cell 30 of the first mother substrate 10 or on the colorfilter unit cell 100 of the second mother substrate 80, so that thetransparent amorphous silicon thin film is formed.

When the transparent thin film is formed on the first mother substrate10 or on the second mother substrate 80, alignment grooves for aligningliquid crystal molecule are formed on the first mother substrate 10 oron the second mother substrate 80 (step S260).

The alignment grooves are formed through to the process in whichpolymers are deposited on the first mother substrate 10 or on the secondmother substrate 80.

In order to deposit polymers on the first mother substrate 10 or on thesecond mother substrate 80, fluorocarbon (CF₄), trifluoromethane (CHF₃)and oxygen (O₂) are supplied to the sealed space that has a lowpressure. Then, the fluorocarbon (CF₄), trifluoromethane (CHF₃) andoxygen (O₂) form the carbon polymer via chemical vapor deposition (CVD).

The carbon polymer is deposited on the first mother substrate 10 or onthe second mother substrate 80, such as snow is deposited on a ground.The carbon polymer is deposited in island shapes that are spaced apartwith each other. That is, the carbon polymer is not deposited on thewhole surface of the first mother substrate 10 or on the second mothersubstrate 80. The islands of carbon polymers are formed via a similarprocess to the process in which seed for forming hemispherical grain(HSG) is scattered uniformly.

Preferably, the islands have enough intervals so that liquid crystalmolecule may be disposed between the islands, and the height of theislands is in the range from about 10 Å to about 100 Å. The carbonpolymer is grown directly upward from the first mother substrate 10 oron the second mother substrate 80.

<Twelfth Embodiment of Non-Contact Type Alignment of Liquid CrystalMolecules>

FIG. 25 is a schematic view showing a non-contact alignment deviceaccording to a twelfth exemplary embodiment of the present invention.FIG. 26 is a cross-sectional view showing a transparent thin film formedon a mother substrate. FIG. 27 is a cross-sectional view showing acarbon polymer formed on the transparent thin film of FIG. 26.

Referring to FIGS. 25 to 27, a non-contact alignment device 369 includesa thin film forming part 360 and a groove forming part 350.

The thin film forming part 360 includes a thin film forming chamber 361,a reaction gas supplying module 362, a plasma generator having a cathodeelectrode 364 and an anode electrode 366, and a vacuum pump 368.

The reaction gas supplying module 362 supplies the thin film formingchamber 361 with silane gas (SiH₄) and hydrogen gas (H₂).

The plasma generator includes a cathode electrode 364 and an anodeelectrode 366. High voltage is applied between the cathode electrode 364and the anode electrode 366, so that the silane gas (SiH₄) and thehydrogen gas (H₂) are reacted with each other.

Referring to FIG. 26, a transparent thin film 365, such as amorphoussilicon thin film, is formed on a first mother substrate 10 or on asecond mother substrate 80 with silane gas (SiH₄) and hydrogen gas (H₂).

Referring again to FIG. 25, the first mother substrate 10 or the secondmother substrate 80 having the transparent thin film is transferred to aload lock chamber 363. The first mother substrate 10 or the secondmother substrate 80 stands by for the next procedure in the load lockchamber 363.

The groove forming part 350 includes a groove forming chamber 351, areaction gas supplying module 353, a reaction gas polymerization unithaving a cathode electrode 355 and an anode electrode 357.

The pressure in the groove forming chamber 351 is maintained at ahigh-vacuum. The first mother substrate 10 having the transparent thinfilm or the second mother substrate 80 having a transparent thin film istransferred to the groove forming chamber 351.

The transparent thin film includes amorphous silicon thin film.

The reaction gas supplying module 353 supplies the groove formingchamber 351 with reaction gas. The reaction gas forms carbon polymer onthe transparent thin film.

Referring to FIG. 27, carbon polymers 358 are formed on a transparentthin film 365. The carbon polymers 358 are formed to be spaced apartwith each other like islands. A longitudinal direction of the carbonpolymers 358 is substantially perpendicular to the surface of thetransparent thin film 365. It is preferable that the height of thecarbon polymers 358 is in the range from about 10 Å to about 100 Å. Thereaction gas includes fluorocarbon (CF₄), trifluoromethane (CHF₃) andoxygen (O₂) for polymerize the fluorocarbon (CF₄) and trifluoromethane(CHF₃).

Referring again to FIG. 25, the reaction gas polymerization unit 355 and357 allows the reaction gas to react with each other so as to producethe carbon polymer 358 of FIG. 27. The reaction gas polymerization unitincludes the cathode electrode 355, the anode electrode 357 and powersupply (not shown). The cathode electrode 355 and the anode electrode357 transform the oxygen into plasma.

The power supply (not shown) provides the cathode electrode 355 and theanode electrode 357 with enough voltage to transform the oxygen intoplasma state.

The groove forming part 350 forms the carbon polymer. The islands ofcarbon polymers are formed via a similar process to the process in whichseed for forming hemispherical grain (HSG) is scattered uniformly.

Referring again to FIG. 1, the island-shaped carbon polymer is referredto as an alignment film. The alignment film is formed as above describedmethod (step S200).

When the alignment film is formed of the thin film transistor unit cell30 of the first mother substrate 10 and on the color filter unit cell100 of the second mother substrate 80, the first mother substrate 10 andthe second mother substrate 80 are assembled into an assembled substrate(step S300).

The first mother substrate 10 and the second mother substrate 80 iserected to be disposed parallel to the gravitational force direction andloaded into an automatically guided vehicle (AGV) or manually guidedvehicle (MGV) and transferred to assembled substrate manufacturingdevice.

In order to form the assembled substrate, a fence is formed on one ofthe thin film transistor unit cell 30 and the color filter unit cell 100(step S305). The number of the thin film transistor unit cell 30 formedon the first mother substrate 10 is equal to the number of the colorfilter unit cell 100 formed on the second mother substrate 80.

The fence includes a curable material and an adhesive material. Thecurable material is cured, when an ultra-violet beam is irradiated ontothe curable material. The adhesive material combines the first mothersubstrate 10 with second mother substrate 80. The fence has band-shapethat has narrow width, and the fence surrounds an edge of the thin filmtransistor unit cell 30 or an edge of the color filter unit cell 100 toform a closed loop.

Liquid crystal is dropped into an internal region defined by the fenceso as to fill up the internal region defined by the fence (step S310).

An amount of liquid crystal filled into the internal region iscalculated based on an area that is surrounded by the fence and cell gapthat is a distance between the thin film transistor unit cell 30 and thecolor filter unit cell 100 when the thin film transistor unit cell 30and the color filter unit cell 100 are assembled.

When the liquid crystal is dropped into the internal region, the liquidcrystal is dropped on a plurality of regions that is disposed in theinternal region.

Then, the first mother substrate 10 and the second mother substrate 80are assembled together in vacuum. The fence intermediates between thefirst mother substrate 10 and the second mother substrate 80.Hereinafter, the thin film transistor unit cell 30 of the first mothersubstrate 10 and the color filter unit cell 100 of the second mothersubstrate 80 are referred to as a liquid crystal display unit cell.

The first mother substrate 10 and the second mother substrate 80including the liquid crystal display unit cell are left underatmospheric pressure for one hour, so that the liquid crystal dropped ona plurality of regions is uniformly spread.

However, even when the first mother substrate 10 and the second mothersubstrate 80 including the liquid crystal display unit cell are leftunder atmospheric pressure for one hour, the liquid crystal of some ofthe liquid crystal display unit cell is not spread. When the liquidcrystal is not spread uniformly throughout the entire liquid crystaldisplay unit cell, an image is not displayed in a liquid crystalunfilled region of the liquid crystal display unit cell, where theliquid crystal does not exist.

Therefore, after the first mother substrate 10 and the second mothersubstrate 80 including the liquid crystal display unit cell are leftunder atmospheric pressure for one hour, a detecting process fordetecting the liquid crystal unfilled region is performed. The detectingprocess is not essential. The detecting process is performed only forreducing the product failure.

FIG. 28 is a flow chart showing a method for detecting unfilled regionin which the liquid crystal is not filled.

Referring to FIG. 28, a first light is generated (step S315) in order todetect the liquid crystal unfilled region. The first light arrives at abottom face of the first mother substrate 10 and passes though the firstmother substrate 10, liquid crystal disposed on the first mothersubstrate. When the first light passes through the liquid crystal, thefirst light is transformed into a second light that has differentcharacteristics from that of the first light.

The second light passes through the second mother substrate 80 and exitsfrom an upper face of the second mother substrate 80.

The second light that exits from the second mother substrate 80 isdetected (step S320).

The detected second light generates an analog signal. The analog signalis transformed into image data that is a digital signal. The image datais compared with reference data (step S325).

When the image data are different from the reference data, the liquidcrystal unfilled region exists in the liquid crystal display unit cell.Therefore, the first mother substrate 10 and the second mother substrate80 including the liquid crystal display unit cell are stood by at anatmospheric pressure for another two hours (step S335).

In order to spread the liquid crystal, an external force may be appliedto the liquid crystal display unit cell.

When the liquid crystal unfilled region is not detected, theultra-violet beam is irradiated onto the fence that combines the firstmother substrate 10 with the second mother substrate 80 so as to curethe fence.

Hereinafter, a detecting device for detecting the liquid crystalunfilled region is described in detail.

FIG. 29 is a schematic view showing an example of detecting device fordetecting the unfilled region.

Referring to FIG. 29, a detecting device for detecting the liquidcrystal unfilled region includes a base body 371, a back light unit 373,an unfilled region detector 375 and a control unit 378.

The back light unit 373, the unfilled region detector 375 and thecontrol unit 378 are installed in the base body 371.

The back light unit 373 includes lamps 374 for generating first light374 a, and the power supply 374 b for supplying the lamps with power. Atransferring unit 374 c is formed over the back light unit 373. Thetransferring unit 374 c loads/unloads the first mother substrate 10 andthe second mother substrate 80 assembled with each other into/from thebase body 371. The transferring unit 374 c includes rollers 374 darranged along a line and a roller driving unit (not shown) for drivingthe rollers 374 d. The rollers 374 d makes contact with the first mothersubstrate 10.

The unfilled region detector 375 faces the back light unit 373.

The unfilled region detector 375 detects second light 375 a and thirdlight 375 b. When the first light 374 a passes through the liquidcrystal, the first light 374 a is transformed into the second light 375a. When the first light 374 a passes through the unfilled region, thefirst light 374 a is transformed into the third light 375 b.

The second light 375 a has different luminance and different color incomparison with the third light 375 b. Therefore, the second light 375 aand the third light 375 b may be detected by the luminance and thecolor.

A charge coupled device camera (CCD camera) may be used as the unfilledregion detector 375. The charge coupled device camera receives thesecond light 375 a and the third light 375 b, generates an analog image,and transforms the analog image into image data. The image data arestored in the data storage module 377 of the control unit 378.Hereinafter, the image data detected from an assembled substrate that isbeing inspected is referred to a detected data. Hereinafter, the imagedata detected from the assembled substrate that has no unfilled regionis referred to as reference data.

The comparing unit 376 compares the detected data with the referencedata.

The reference data do not include data that are obtained from the thirdlight 375 b. When an assembled substrate has unfilled region, detectingdata detected from the assembled substrate includes data that areobtained from the second light 375 a and data that are obtained from thethird light 375 b.

The comparing unit 376 compares the detected data stored in the datastorage module 377 with the reference data. When the detected data issubstantially equal to the reference data, the comparing unit 376concludes that the assembled substrate has no unfilled region. When thedetected data are different from the reference data, the comparing unit376 concludes that the assembled substrate has unfilled region.

When the detecting procedure is finished, the assembled substrate iserected to be disposed in parallel with the gravitational forcedirection and transferred by an automatically guided vehicle (AGV) ormanually guided vehicle (MGV) to a non-contact inspecting device thatinspects the liquid crystal display unit cell.

Referring again to FIG. 1, when the liquid crystal is supplied (stepS500), the liquid crystal display unit cell is inspected, whether theliquid crystal display unit cell is normal or not (step S400) before theliquid crystal display unit cell is separated from the first mothersubstrate 10 and the second mother substrate 80.

In general, the liquid crystal display unit cell is inspected, whetherthe liquid crystal display unit cell has defects or not, after theliquid crystal display unit cell is separated from the first mothersubstrate 10 and the second mother substrate 80.

However, in the present invention, the sequence is changed. According tothe exemplary embodiment of the present invention, the liquid crystaldisplay unit cell is inspected, whether the liquid crystal display unitcell has defects or not, before the liquid crystal display unit cell isseparated from the first mother substrate 10 and the second mothersubstrate 80.

It may be hard to inspect the liquid crystal display unit cell beforethe liquid crystal display unit cell is separated, because inputterminal for receiving a signal that drives the liquid crystal displayunit cell is disposed between the first mother substrate 10 and thesecond mother substrate 80.

Hereinafter, a method of examining the liquid crystal display unit cellby applying a test signal to the input terminal disposed between thefirst mother substrate and the second mother substrate will beexplained.

FIG. 30A is a flow chart showing a non-contact inspecting method ofinspecting the liquid crystal display unit cell.

Referring to FIG. 30A, in order to drive the liquid crystal display unitcell, photoelectro-motive force is applied to the liquid crystal displayunit cell (step S410).

FIG. 30B is a flow chart showing a method of driving the liquid crystaldisplay unit cell of FIG. 30A.

Referring to FIGS. 3, 6 and 30B, the first light is applied to a gateline, so that a first photoelectro-motive force is applied to the gateline 50 of the thin film transistor unit cell 50 (step S412). The secondlight is applied to a data line, so that a second photoelectro-motiveforce is applied to the data line 60 of the thin film transistor unitcell 50 (step S414). A third light may be applied, so that a thirdphotoelectro-motive force is applied to a common electrode (not shown)of the color filter unit cell 100 (step S416).

The first photoelectro-motive force may be applied to at least two gatelines 50, simultaneously. The first photoelectro-motive force may beapplied to one of the gate lines 50. The first photoelectro-motive forceis large enough to turn on the thin film transistor 40. However, thefirst photoelectro-motive force is not too large to damage the channellayer 48 of the thin film transistor 40.

The second photoelectro-motive force may be applied to at least two datalines 60, simultaneously. Alternatively, the second photoelectro-motiveforce may be applied to one of the data lines 60. The secondphotoelectro-motive force is applied to the source electrode 44 of thethin film transistor 40. The second photoelectro-motive force may bedifferently applied to each of the data lines 60 so as to display a testimage.

The third photoelectro-motive force may be applied to the commonelectrode 120 of FIG. 6. A magnitude of the third photoelectro-motiveforce is different from those of the first photoelectro-motive force andthe second photoelectro-motive force. The third photoelectro-motiveforce may be connected to an earth potential. When the thirdphotoelectro-motive force is connected to the earth potential, the thirdlight may not be applied.

When the first photoelectro-motive force is applied to the gate line,the thin film transistor 40 is turned on. Then, the secondphotoelectro-motive force that is applied to the data lines 60 istransferred to the pixel electrode 70, so that alignment of the liquidcrystal molecules disposed between the pixel electrode 70 and the commonelectrode 120 is changed. When the alignment of the liquid crystalmolecules disposed between the first mother substrate 10 and the secondmother substrate 80 is changed, the light that passes through the liquidcrystal display device is transformed into the test image.

By the test image, the liquid crystal display unit cell is inspected,whether the liquid crystal display unit cell is normal or not (stepS420).

FIG. 30C is a flow chart showing a method of inspecting the liquidcrystal display unit cell of FIG. 30A.

Referring to FIGS. 30A and 30C, the charge coupled device (CCD) cameradetects the test image and transforms the test image into image data(step S422). The liquid crystal display unit cell determines whether theliquid crystal display unit cell is normal or not (step S430) bycomparing the image data with reference data (step S424).

When the liquid crystal display unit cell is not normal, the liquidcrystal display unit cell marked as abnormal unit cell to show thatliquid crystal display unit cell is not normal.

As described above, the liquid crystal display unit cell is inspectedwhether the liquid crystal display unit cell is normal or not bynon-contact alignment method, in order to attach polarizing plate onlyto a normal liquid crystal display unit cell.

FIG. 31 is a schematic view showing an example of a non-contactinspecting device.

Referring to FIG. 3 and FIG. 31, an inspecting device 380 includes abase body 390, a photoelectro-motive force applying part 400, a displaylight applying part 410, a detector 420 and a control unit 430.

The first mother substrate 10 and the second mother substrate 80 wherethe liquid crystal display unit cell is formed are loaded on (orunloaded from) the base body 390.

The photoelectro-motive force applying part 400 includes a firstphotoelectro-motive force applying part 402, a secondphotoelectro-motive force applying part 404 and a thirdphotoelectro-motive force applying part 406.

The first photoelectro-motive force applying part 402 applies a firstphotoelectro-motive force to the gate line 50 of the thin filmtransistor unit cell 30 to turn on the thin film transistor 40. Thefirst photoelectro-motive force may be applied to at least two gatelines 50 simultaneously or one gate line 50.

The second photoelectro-motive force applying part 404 applies a secondphotoelectro-motive force to the data line 60 of the thin filmtransistor unit cell 30 so as to apply the second photoelectro-motiveforce to the source electrode 44. The second photoelectro-motive forceis transferred to the pixel electrode 70 via the drain electrode 46.

Referring to FIG. 6 and FIG. 31, the third photoelectro-motive forceapplying part 406 applies a third photoelectro-motive force to thecommon electrode 120 of the color filter unit cell. Then, electric fieldis formed between the common electrode 120 and the pixel electrode ofFIG. 3 to change an alignment of the liquid crystal molecule.

However, when a display light 411 is absent, an operation of the liquidcrystal display unit cell may not be perceived.

The display light applying part 410 applies the display light 411 thatadvances toward the first mother substrate 10.

The detector 80 detects a test image 412. When the display light 411passes through the first mother substrate 10, a liquid crystal disposedon the first mother substrate 10 and the second mother substrate 80, thedisplay light 411 is transformed into the test image 412. The detector420 transforms an analog signal into a digital signal. For example, acharge coupled device (CCD) camera may be used as the detector 420.

The control unit 430 examines the operation of the liquid crystaldisplay unit cell by comparing the digital signal with reference signal.

When the liquid crystal display unit cell is examined whether or not theliquid crystal display unit cell is normal, the assembled substrate iserected and transferred to next procedure of attaching a polarizingplate to the liquid crystal display unit cell that is normal.

FIG. 32 is a schematic view showing an example of an attaching devicefor attaching a polarizing plate to the liquid crystal display unitcell.

Referring to FIG. 32, an attaching device 440 includes a base body 450,a first polarizing plate attaching module 460, a second polarizing plateattaching module 470, a first cutting out module 480, a second cuttingout module 490, a first protection sheet strip module 500 and a secondprotection sheet strip module 510.

The base body 450 provides a space where the first polarizing plateattaching module 460, the second polarizing plate attaching module 470,the first cutting out module 480, the second cutting out module 490, thefirst protection sheet strip module 500 and the second protection sheetstrip module 510 are installed.

For example, the base body 450 may have a box shape. A longitudinaldirection of the base body 450 is referred to as an x-direction, and alateral direction of the base body 450 is referred to as a y-direction.

An assembled substrate loader 520 is formed on the base body 450. Anassembled substrate that is inspected whether or not the assembledsubstrate is normal is loaded on the assembled substrate loader 520.

A first polarizing plate loader 530 and a second polarizing plate loader540 are disposed on the base body 450. The first polarizing plate loader530 and the second polarizing plate loader 540 are spaced apart from theassembled substrate loader 520. The first polarizing plate loader 530and the second polarizing plate loader 540 are parallel with each other,and disposed in the y-direction.

The first polarizing plate has substantially an equal size to theassembled substrate. The first polarizing plates that are attached ontothe thin film transistor unit cell are loaded on the first polarizingplate loader 530.

FIG. 33 is a cross-sectional view showing a first mother polarizingplate.

Referring to FIG. 33, a first mother polarizing plate 534 includes afirst base film 531, a first polarizing plate 532 and a first protectionsheet 533.

The first mother polarizing plate 534 may have a smaller size than theassembled substrate. For example, the liquid crystal display unit cellis arranged in a 3×2 matrix shape, the first mother polarizing plate 534may have an enough size to form three first polarizing plate 532 or twofirst polarizing plate 532.

Referring again to FIG. 32, the second polarizing plate has asubstantially equal size to the assembled substrate. The secondpolarizing plates that are attached onto the color filter unit cell areloaded on the second polarizing plate loader 540.

The second mother polarizing plate 544 may have a smaller size than theassembled substrate. For example, the liquid crystal display unit cellis arranged in a 3×2 matrix shape, the second mother polarizing plate544 may have an enough size to form three first polarizing plate 532 ortwo first polarizing plate 532.

FIG. 34 is a cross-sectional view showing a second mother polarizingplate.

Referring to FIG. 34, a second mother polarizing plate 544 includes asecond base film 541, a second polarizing plate 542 and a secondprotection sheet 543.

Referring again to FIG. 32, a first cutting out module 480 and a secondcutting out module 490 are formed on the base body 450.

The first cutting out module 480 is disposed adjacent to the firstpolarizing plate loader 530. The second cutting out module 490 isdisposed adjacent to the second polarizing plate loader 540.

The first cutting out module 480 cuts out the first mother polarizingplate in accordance with a size of the thin film transistor unit cell.The first cutting out module 480 cuts out the first mother polarizingplates 534, such that a number and a size of the first mother polarizingplates 534 are equal to a number and a size of the thin film transistorunit cells. The first cutting out module 480 may cut out the firstmother polarizing plates 534, which are included in one column or on rowof the thin film transistor unit cells arranged in a matrix shape.

The second cutting out module 490 cuts out the second mother polarizingplate in accordance with a size of the color filter unit cell. Thesecond cutting out module 490 cuts out the second mother polarizingplates 544, such that a number and a size of the second motherpolarizing plates 544 are equal to a number and a size of the thin filmtransistor unit cells. The second cutting out module 490 may cut out thesecond mother polarizing plates 544, which are included in one column oron row of the thin film transistor unit cells arranged in a matrixshape. FIG. 35 is a schematic view showing an example of a firstcutting-out module of FIG. 32.

Referring to FIG. 35, a first cutting out module 480 includes an x-axisblade module 481 and a y-axis blade module 486.

The x-axis blade module 481 includes a first x-axis blade 482 and afirst x-axis blade driving unit 483. The length of the first x-axisblade 482 is equal to an x-direction length of the thin film transistorunit cell. The first x-axis blade driving unit 483 pushes and pulls thefirst x-axis blade 482, such that a first protection sheet 533 and afirst polarizing plate 532 are completely cut and a portion of a firstbase film 531 is cut.

FIG. 36 is a schematic view showing a first (or second) motherpolarizing plate cut out by a first x-axis blade of FIG. 35.

Referring to FIG. 36, a first mother polarizing plate 534 is cut by thefirst x-axis blade module 481 of FIG. 35.

Referring again to FIG. 35, the y-axis blade module 486 includes a firsty-axis blade 484 and a first y-axis blade driving unit 485. The lengthof the first y-axis blade 484 is equal to an y-direction length of thethin film transistor unit cell. The first y-axis blade driving unit 485pushes and pulls the first y-axis blade 484 such that a first protectionsheet 533 and a first polarizing plate 532 are completely cut and aportion of a first base film 531 is cut.

FIG. 37 is a schematic view showing a first (or second) motherpolarizing plate cut out by a first y-axis blade after cut out by thefirst x-axis blade of FIG. 35.

Referring to FIGS. 33 and 37, a first mother polarizing plate 534 is cutby the first y-axis blade module 486 of FIG. 35 so that a firstpolarizing plate 532 of the first mother polarizing plate 534 is cut tohave a substantially equal size to the thin film transistor unit cell.

Referring again to FIG. 32, the second cutting out module 490 has anequal element with the first cutting out module 480. Therefore, anexplanation of the second cutting out module 490 is omitted.

The first protection sheet strip module 500 and the second protectionsheet strip module 510 are formed on the base body 450. The firstprotection sheet strip module 500 is disposed adjacent to the firstcutting out module 480. The second protection sheet strip module 510 isdisposed adjacent to the second cutting out module 490.

FIG. 38 is a schematic view showing a first protection-sheet stripmodule of FIG. 32.

Referring to FIG. 38, a first protection sheet strip module 500 strips afirst protection sheet 533 a that is attached on the first polarizingplate 532 a, after the first protection sheet 533 and the firstpolarizing plate 532 of FIG. 33 are cut by the first cutting out module480 of FIG. 32.

The first protection sheet strip module 500 includes a picker 501 and apicker driving module 503.

The picker driving module 503 pushes the picker 501 such that the pick501 makes touch with the first protection sheet 533 a.

The picker 501 absorbs the first protection sheet 533 a by means ofvacuum pressure. Then, the picker driving module 503 pulls the picker501. When the picker 501 absorbs the first protection sheet 533 a morestrongly than the adhesive power that combines the first protectionsheet 533 a with the first polarizing plate 532 a, the first protectionsheet 533 a is detached from the first polarizing plate 532 a.

When the first protection sheet 533 a is detached from the firstpolarizing plate 532 a, the first polarizing plate is attached on thethin film transistor unit cell of the liquid crystal display unit cell.

Referring again to FIG. 32, the second protection sheet strip module 510has equal elements to the first protection sheet strip module 500.Therefore, an explanation of the second protection sheet strip module510 is omitted.

A first turning over module 560 and a second turning over module 570 areformed on the base body 450. The first turning over module 560 isdisposed adjacent to the first protection sheet strip module 500. Thesecond turning over module 570 is disposed adjacent to the secondprotection sheet strip module 510.

The first turning over module 560 and the second turning over module 570turn over the first mother polarizing plate and the second motherpolarizing plate respectively, such that an exposed first polarizingplate of the first mother polarizing plate faces the thin filmtransistor unit cell and an exposed second polarizing plate of thesecond mother polarizing plate faces the color filter unit cell.

The first polarizing plate attaching module 460 and the secondpolarizing plate attaching module 470 are formed on the base body 450.The first polarizing plate attaching module 460 is disposed adjacent tothe first turning over module 560. The second polarizing plate attachingmodule 470 is disposed adjacent to the second turning over module 570.

The first polarizing plate attaching module 460 attaches the firstmother polarizing plate on the assembled substrate. The secondpolarizing plate attaching module 470 attaches the second motherpolarizing plate on the assembled substrate.

FIG. 39 is a schematic view showing a polarizing plate attaching moduleof FIG. 32.

Referring to FIG. 39, a first polarizing plate attaching module 460includes a first assembled substrate supporting unit 461 and the firstpolarizing plate attaching unit 466.

The first assembled substrate supporting unit 461 supports an assembledsubstrate 85. The first assembled substrate supporting unit 461 includesa first assembled substrate supporting plate 462 and a first assembledsubstrate absorbing part 463.

The first assembled substrate supporting plate 462 includes a pluralityof first penetration holes 462 a.

The first assembled substrate absorbing part 463 includes a first vacuumpipe 463 a and a first vacuum generating member 463 b. A first end ofthe first vacuum pipe 463 a is connected with the first penetration hole462 a of the first assembled substrate supporting plate 462, and asecond end of the first vacuum pipe 463 a is connected with the firstvacuum generating member 463 b. The first vacuum generating member 463 bforms a substantially vacuum state, so that the assembled substrate 85is fixed to the first assembled substrate supporting plate 462.

The first polarizing plate attaching unit 466 includes a first pushingplate 468 and a first pushing plate driving module 467.

The first pushing plate driving module 467 pushes the first pushingplate 468 so that a first polarizing plate 532 a of a first motherpolarizing plate 534 makes contact with the thin film transistor unitcell (not shown) of the first mother substrate 10. Therefore, the firstpolarizing plate 532 a that is cut by the first cutting out module 480of FIG. 32 is attached on the thin film transistor unit cell (not shown)of the first mother substrate 10.

Referring again to FIG. 32, the second polarizing plate attaching unit470 is equal to the first polarizing plate attaching unit 460.Therefore, an explanation of the second polarizing plate attaching unit470 is omitted.

A third tuning over module 580 is disposed between the first polarizingplate attaching module 460 and the second polarizing plate attachingmodule 470.

The third tuning over module 580 turns over the assembled substrate onwhich the first polarizing plate is attached in order that the secondpolarizing plate may be attached on color filter unit cell.

When the first polarizing plate is attached on the thin film transistorunit cell and the second polarizing plate is attached on the colorfilter unit cell, a transferring arm transfers the assembled substrateto an assembled substrate unloading module 590. Two assembled substrateunloading modules 590 are formed

Referring again to FIG. 1, when the first polarizing unit cell isattached on the thin film transistor unit cell of the assembledsubstrate and the second polarizing unit cell is attached on the colorfilter unit cell of the assembled substrate, the liquid crystal displayunit cell is separated from the assembled substrate by non-contactmethod using laser beam or by contact method using diamond blade (stepS500).

The liquid crystal display unit cell that is separated from theassembled substrate is referred to as a liquid crystal display panel.

A flexible tape carrier package (TCP) and a printed circuit board (PCB)is attached onto the liquid crystal display panel so as to manufacture aliquid crystal display panel assembly (step S600).

The liquid crystal display panel assembly is combined with a back lightassembly, so that a liquid crystal display device is manufactured.

While the exemplary embodiments of the present invention and itsadvantages have been described in detail, it should be understood thatvarious changes, substitutions and alterations can be made hereinwithout departing from the spirit and scope of the invention as definedby appended claims.

1. A method of manufacturing a liquid crystal display device,comprising: forming a plurality of thin film transistor unit cells on athin film transistor unit cell region of a first mother substrate;forming a plurality of color filter unit cells on a color filter unitcell region of a second mother substrate; forming a liquid crystalaligning member on the thin film transistor unit cells and on the colorfilter unit cells; assembling the first mother substrate and the secondmother substrate to form an assembled substrate, such that the thin filmtransistor unit cells face the color filter unit cells respectively, anda liquid crystal layer is disposed between the thin film transistor unitcells and the color filter unit cells; applying a test driving signal toa plurality of liquid crystal display unit cells via a non-contactmethod to inspect the liquid crystal display unit cells, each of theliquid crystal display unit cells including a thin film transistor unitcell, a color filter unit cell facing the thin film transistor unitcell, and the liquid crystal layer; separating each of the liquidcrystal display unit cells from the assembled substrate; and assemblinga driving module with the liquid crystal display panel to form a liquidcrystal display panel assembly, the driving module driving the liquidcrystal display panel, wherein the first and second mother substratesare erected to be disposed parallel to a gravitational force directionand transferred so as to manufacture the liquid crystal display deviceafter the thin film transistor unit cells and the color filter unitcells are formed on the first and second mother substrates,respectively.
 2. The method of claim 1, wherein the liquid crystalaligning member is formed by: forming an alignment film comprised of analignment material having a carbon-carbon double bond; and irradiatingan atomic beam onto the alignment film at a first angle with respect tothe alignment film to transform the carbon-carbon double bond into acarbon-carbon single bond having a polarized functional group, and thefirst angle being substantially equals to a pre-tilt angle of liquidcrystal molecules of the liquid crystal layer.
 3. The method of claim 2,wherein the atomic beam is irradiated onto the alignment film such thatthe atomic beam forms an angle in a range from about 0° to about 90°with respect to the alignment film.
 4. The method of claim 3, whereinthe alignment material is any one selected from the group consisting ofdiamond-like-carbon (DLC), SiO₂, Si₃N₄ and TiO₂.
 5. The method of claim1, wherein the assembled substrate is formed by: forming a fence on oneof the thin film transistor unit cell and the color filter unit cell;filling the liquid crystal layer in a space defined by the fence; andassembling the first mother substrate and the second mother substrate.6. The method of claim 1, further comprising: applying a first light tothe first mother substrate, the first light passing through the firstmother substrate, the liquid crystal and the second mother substrate tobe transformed into a second light; detecting the second light to obtainunit cell data, each of the unit cell data containing a first imageinformation of each of the liquid crystal display unit cells; andcomparing the liquid crystal cell data with reference data to detect anunfilled region where the liquid crystal is not filled, the referencedata containing a second image information of the liquid crystal displayunit cell having no unfilled region.
 7. The method of claim 6, whereinthe second light is detected by a charge coupled device (CCD) camera. 8.The method of claim 6, further comprising: exposing the assembledsubstrate at an atmospheric pressure for a predetermined time when theunfilled region is detected.
 9. The method of claim 1, wherein theliquid crystal display unit cell is examined by: applying aphotoelectro-motive force as a test driving signal to each of the liquidcrystal display unit cells; applying a test light to the liquid crystaldisplay unit cell, the test light being transformed into a test imagewhile the test light passing through each of the liquid crystal displayunit cells; and inspecting the test image to examine a display qualityof each of the liquid crystal display unit cells.
 10. The method ofclaim 9, wherein the photoelectro-motive force is formed by: applying afirst light to a gate line formed in each of the thin film transistorunit cells to generate a first photoelectro-motive force; and applying asecond light to a data line formed in each of the thin film transistorunit cells to generate a second photoelectro-motive force.
 11. Themethod of claim 10, wherein the photoelectro-motive force is formed byfurther applying a third light to a common electrode formed in each ofthe color filter unit cells to generate a third photoelectro-motiveforce.
 12. The method of claim 10, wherein the first photoelectro-motiveforce is higher than a threshold voltage of a thin film transistorconnected to the gate line.
 13. The method of claim 9, wherein the testimage is inspected by: detecting the test image to generate test imagedata; and comparing the test image data with reference data.
 14. Themethod of claim 13, wherein the test image is inspected by a chargecoupled device (CCD) camera.
 15. The method of claim 1, furthercomprising: attaching a first polarizing plate on the first mothersubstrate; and attaching a second polarizing plate on the second mothersubstrate, the first polarizing plate and the second polarizing platebeing attached after examining the liquid crystal display unit cells.16. The method of claim 1, wherein an edge of each of the liquid crystaldisplay unit cells is cut by a laser beam, so that the liquid crystaldisplay unit cells is separated into each of the liquid crystal displayunit cells.